Nanofabrication / Nanoimprint Lithography Systems Obducat Sindre Nanoimprint System R2P Platform

The Obducat Sindre Platform is a pre-owned nanoimprint lithography system suited for high-volume production of nano- and micro-scale patterns. With its fully automated design, this system offers competitive cost-of-ownership, exceptional throughput, and sub-50nm resolution. Key technologies include SoftPress for imprint uniformity, IPS technology for improved stamp life, and STU technology for simultaneous thermal and UV processes. It supports a range of applications including optics, bio-medical devices, and LED displays. Configurable for multiple substrate sizes and shapes, it operates on 400V with a built-in computer and software. Ideal for cleanroom installations.

System could not be fully tested; proper facility requirements (dedicated power, utilities, and setup) were not available at the time of inspection. System is pre-owned and was sourced from a working environment. Visual inspection shows minimal cosmetic wear consistent with normal previous use. Overall condition appears intact. Recommend installation in an appropriate facility and full operational testing by qualified personnel prior to use.

• Fully automated nanoimprint lithography for high-volume production
• SoftPress technology ensures imprint uniformity
• IPS improves stamp life and contamination control
• STU combines thermal and UV imprint processes
• Compatible with substrates from 2-8 inch Ø
• Throughput up to 70 wafers per hour
• Operates on 400V, includes computer and software

• Substrate size: 2-8 inch Ø
• Throughput: Up to 70 wafers per hour
• Imprint pressure: 5-50 bar
• Imprint temperature: Ambient to 200°C
• UV light wavelengths: 365 nm, 100 mW/cm²
• Imprinted resolution: Sub 50nm
• Power requirements: 400 VAC, 3 phase, 50/60 Hz, 20 kVA
• Compressed air: 6-8 bar, with peak at 100 l/min
• High pressure nitrogen or air: 60 bar pressure, consumption 15 l/min
• Exhaust outlets: 3, plus one for the chiller, 4500 l/min flow

Imperial: 4920.0 Pounds

Metric: 2231.67 Kilograms

Imperial: 147.6 lb x 57.6 lb x 110.4 lb

Metric: 374.9 cm x 146.3 cm x 280.42 cm