Genmark Axus, Dual-Arm Wafer Handling Robot, 200/300 mm Wafer Size, Multi-Axis

$2,950 USD

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The Genmark Axus 9500S0107A is a dual-arm atmospheric wafer handling robot. It is engineered for precise, high-speed transfer of semiconductor wafers. This system typically supports wafer sizes of both 200mm and 300mm, accommodating common industry standards. The robot integrates multi-axis motion control, providing radial, rotational, and vertical movement for each arm to facilitate accurate and repeatable wafer placement within a process environment. Designed for automated operation, it ensures delicate handling with high positional repeatability, crucial for semiconductor manufacturing processes.